Polyethersulfone Membrane Filter Capsule (Electronic Grade) - EPS

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The EPSX Filter is a single-layer Polyethersulfone (PES) membrane filter designed for ultrafine particle removal in high-purity electronic chemical applications. With low extractables and fast rinse-up/down characteristics, EPSX filters are ideal for UPDI water systems and aggressive chemistries used in semiconductor manufacturing.

These hydrophilic filters offer broad pH compatibility and high flow rates, and are constructed using identical materials across all capsule and cartridge sizes to ensure consistent results from lab to production.

Key Features:

• Hydrophilic PES membrane with low TOC and conductivity rinse-up
• Broad chemical and pH compatibility
• Final filtration-grade retention with high throughput
• Pulse power flushed to 18+ Megohm-cm, <3ppb TOC
• 100% integrity tested and scalable across sizes

Performance Parameters:

• Max Operating Temp (Water): 180 °F (cartridges), 110 °F (capsules)
• Forward Pressure Limit: 80 psid at 68 °F
• Reverse Pressure Limit: 50 psid at 68 °F
• Recommended Changeout: 35 psid

Sterilization & Cleaning:

• Autoclave: 250 °F (121 °C), 30 min, 25+ cycles
• Inline Steam: 275 °F (135 °C), 30 min
• Hot Water: 194 °F (90 °C), 30 min, max 3 psid forward
• Compatible with H₂O₂, peracetic acid, bleach, etc.

Filtration Area (Nominal):

• 2" – 1.2 ft² (0.11 m²)
• 5" – 3.4 ft² (0.32 m²)
• 10" – 7.3 ft² (0.68 m²)
• 20" – 14.6 ft² (1.36 m²)
• 30" – 21.9 ft² (2.04 m²)
• 40" – 29.2 ft² (2.72 m²)

Construction Materials:

• Filtration Media: Single-layer PES membrane
• Support Cage & Core: Polypropylene
• Sealing Method: Thermal bonding
• O-Rings (Cartridges only): Buna, Viton® (FKM), EPDM, Silicone, FEP-encapsulated options

Validated Retention & Testing:

• Pore Sizes: 0.02, 0.03, 0.10, 0.22, 0.45 µm
• Diffusion/Bubble Point tested (ASTM F838 compliant)
• TOC/Conductivity: Conforms with SEMI F63 & F104 standards

Typical Applications:

• UPDI Water
• Acids & Bases
• Etch Baths
• Solvents
• Bulk Chemicals
• Plating Solutions